Note: a list of ALD review papers is available at the end. Atomic layer deposition or ALD is amazingly popular these days and this is also reflected by the large number of review articles that have appeared over the recent
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Bridging academia and business – the heart of a successful collaboration in atomic scale processing
Fitting to the contents of this post on collaboration, this post will appear both on Atomic Limits and on the Oxford Instruments Plasma Technology blog. What defines a truly successful collaboration? It has to be something where the whole is
Atomic Layer Deposition Process Development
– 10 steps to successfully develop, optimize and characterize ALD recipes
Note: This post can also be downloaded at the bottom of this page. Please cite as: M.F.J. Vos, A.J.M. Mackus, W.M.M. Kessels. Atomic Layer Deposition Process Development – 10 steps to successfully develop, optimize and characterize ALD recipes. 2019, 3.
Topographically selective processing
– Taking selectivity up a notch by processing in the 3rd dimension
Recently, the art of processing materials in a selective manner has garnered significant attention. Especially in the past few years, the topic of making atomic scale processing techniques, such as atomic layer deposition (ALD) and atomic layer etching (ALE), more
Overview of all materials prepared by atomic layer deposition (ALD)
– An up-to-date and colorful periodic table (to download)
As you might have noticed, we have just started a year in which we celebrate the discovery of the Periodic System by Dmitri Mendeleev: 2019 is the 150th anniversary of the Periodic Table of Chemical Elements and has therefore been
Towards Area-Selective Atomic Layer Deposition with High Selectivity
– Our perspective on area-selective ALD
We just published a perspective article entitled “From the bottom-up: towards area-selective atomic layer deposition with high selectivity”.1 This perspective describes the current status of the field of area-selective atomic layer deposition (ALD), and also includes my vision on how
Where do our students and postdocs go? Mainly to ASML?
– About the alumni of the Plasma & Materials Processing research group
When evaluating what comes out of a university research group, often the research carried out by the group is given most attention. However, obviously, the most important product of a research group is not the research itself but it’s the
In situ Studies of ALD Processes & Reaction Mechanisms
It is the time of the year that the annual AVS International Conference on Atomic Layer Deposition combined with the International Atomic Layer Etching Workshop takes place. The location of 18th edition of the ALD conference (ALD 2018) and the
Looking back at the passivating contact workshop in Eindhoven (part 3 of 3)
– Novel non-silicon based passivating contact materials
During the passivating contact workshop in Eindhoven earlier this year more than 80 people enjoyed several in-depth presentations and discussions on this hot topic in crystalline silicon PV research. Since the PV conference low season / summer break has
Looking back at the passivating contact workshop in Eindhoven (part 2 of 3)
– Passivating contact materials based on silicon
During the passivating contact workshop in Eindhoven earlier this year more than 80 people enjoyed several in-depth presentations and discussions on this hot topic in crystalline silicon PV research. Since the PV conference low season / summer break has