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Advanced ALD cycles for area-selective ALD

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Advanced ALD cycles

Schematic overview of conventional and advanced area-selective ALD processes.
Mackus et al., Chem. Mater. 2019, 31, 2−12

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Bart Macco

I'm an assistant professor at the Eindhoven University of Technology with a passion for atomic-scale processing of semiconductor nanolayers. Moreover, I'm the person managing this blog! Hope you like it!

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