Atomic layer deposition and etching for quantum technologies: Workshop on the 20th of May 2025!

On the 20^th of May 2025, a full day event will be organized at the Eindhoven University of Technology focusing on the opportunities that atomic layer deposition (ALD) and atomic layer etching (ALE) provide for quantum technologies. A preliminary program is available below, featuring established speakers from industry and academia.

This workshop is part of our atomic scale processing for quantum technologies project, funded by Dutch council of research (NWO). More detailed description about this project can be found in this earlier blogpost. Moreover, a new post on this topic will be available soon, so stay tuned.

Aim of the Workshop

The workshop aims to foster discussions on the potential of ALD and ALE in advancing quantum technologies. While we will highlight some of our recent findings in the field, the primary focus will be on providing representatives of key industry and knowledge institutions with an opportunity to share their insights into the future developments of atomic scale processes for quantum technologies.

With some similarities to development of nanoelectronics over the years, quantum technologies are at a critical juncture, requiring breakthroughs in materials science and engineering, including the development of new materials, device scaling, and enhancements in fidelity and reproducibility. We firmly believe that ALD and ALE can contribute to advancing quantum technologies, as done for nanoelectronics, and with this workshop, we target the following objectives:

• Bridge the gap between the quantum community and the field of ALD/ALE by introducing topics of mutual interest to both communities.
• Present an overview of the overlap between both fields to foster collaboration and identify further needs and expectations.
• Initiate discussions on promising applications of atomic-scale processes in the future development of quantum devices.

Preliminary program

• 8:45-9:00        Welcome
• Introduction to ALD/ALE and Quantum Technologies
  • 9:00-9:45         ALD and ALE 101 (Erwin Kessels, TU/e )
  • 9:45-10:30       Quantum technology 101 (Gary Steele, TUD)
• 10:30-11:00     Break
• 11:00-12:30:    3 presentation slots of 30 mins
• 12:30-14:00    Lunch break and posters
• 14:00-15:30     3 presentation slots of 30 mins
• 15:30-16:00    Break
• 16:00-16:45     Discussion about ALD and ALE opportunities for QT
• 16:45-17:00     Closing remarks
• 17:00-18:00    Drinks and posters
• The workshop will feature speakers from QuantWare, Oxford Instruments, TNO, TU Delft, University of Glasgow, TU Eindhoven and more.

Information about registration:

• Location: TU Eindhoven campus, in the “Zwarte Doos“. Google maps
• Costs: Participation is free, though registration is required.
• Deadline Registration: 10^th of May 2025
• Date Workshop: 20^th of May 2025 – full-day on-site
• Food: Lunch will be served, dietary preferences can be indicated during the registration