As you might have noticed, we have just started a year in which we celebrate the discovery of the Periodic System by Dmitri Mendeleev: 2019 is the 150^th anniversary of the Periodic Table of Chemical Elements and has therefore been proclaimed the “International Year of the Periodic Table of Chemical Elements (IYPT2019)” by the United Nations General Assembly and UNESCO.

Of course, within the field of atomic layer deposition (ALD) we also cherish the Periodic Table a lot. As a matter of fact, it is often used to show which materials have been prepared by ALD. As far as I know, Riikka Puurunen started with this in her highly-cited review paper that appeared in Journal of Applied Physics [1] in 2005. This review paper gives a very helpful overview of all ALD processes that were reported in the literature up to February 2005. Several years later, this table was updated by Ville Miikkulainen, Markku Leskelä, Mikko Ritala, and Riikka Puurunen in another ALD review paper that was published in Journal of Applied Physics [2]. This review, which appeared in 2013 contained an overview of all materials prepared by ALD reported in the literature up to December 2010. Although extremely valuable for all of us that are interested in ALD, both papers only contained a black-and-white version of the figure which is not well suited for fancy presentations about ALD. Furthermore, having arrived in 2019, it is very urgent to have an update to the Periodic Table with ALD-prepared materials available.

For this reason, I have arranged an updated, colorful version of the Period Table with ALD materials, see below. The starting point was the aforementioned paper by Ville Miikkulainen, Markku Leskelä, Mikko Ritala, and Riikka Puurunen and the update was done with help of Harm Knoops.

Overview of the materials prepared by ALD. Growth of pure elements as well as compounds with oxygen, nitrogen, sulphur, selenium, tellurium, fluorine, and other compounds grouped together is indicated through shadings of different types at different positions. The elements are named according to the recommendations of The International Union of Pure and Applied Chemistry (IUPAC). – Update February 2019.
This work is licensed under a Creative Commons Attribution 4.0 International License.

In case a new material has been added to class of materials prepared by ALD, please leave a comment on this blog (see below). The same thing can be done if you find an error or have any other comment/correction to make. The intention is to update the figure every year.

Download table figure – update February 2019

High resolution files of the Periodic Table with ALD materials can be downloaded here

 

 

This work is licensed under a Creative Commons Attribution 4.0 International License.

References

Publications containing a Periodic Table to present an overview of the materials prepared by ALD:

[1] Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process, R.L. Puurunen, J. Appl. Phys. 97, 121301 (2005). (http://dx.doi.org/10.1063/1.1940727)

[2] Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends, V. Miikkulainen, M. Leskelä, M. Ritala, and R.L. Puurunen, J. Appl. Phys. 113, 021301 (2013). (http://dx.doi.org/10.1063/1.4757907)

[3] Metal ALD and pulsed CVD: Fundamental reactions and links with solution chemistry, D.J.H. Emslie, P. Chadha, J.S. Price, Coordination Reviews, Coordination Chemistry Reviews 257, 3282 (2013). (http://dx.doi.org/10.1016/j.ccr.2013.07.010)

[4] Atomic  layer deposition, H.C.M. Knoops, S.E. Potts, A.A. Bol, and W.M.M. Kessels, Chapter 27 in “Handbook of Crystal Growth” (T. Kuech eds.), Elsevier (2015). (https://www.elsevier.com/books/handbook-of-crystal-growth/kuech/978-0-444-63304-0)

(download a free copy of the chapter here).